4 Patents
- US125657032026Atomic Layer Deposition and Vapor Deposition Reactor with In-chamber Microplasma Source
The Board Of Trustees Of The University Of Illinois
0 cites - US124364432025Light Generation and Distribution Methods and Systems for Disinfection, Medical Therapeutics, and Lighting
The Board Of Trustees Of The University Of Illinois
0 cites - US121745442024Photoresist-free Deposition and Patterning with Vacuum Ultraviolet Lamps
The Board Of Trustees Of The University Of Illinois
0 cites - US116901602023Plasma Photonic Crystals with Integrated Plasmonic Arrays in a Microtubular Frame
The Board Of Trustees Of The University Of Illinois
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