Patents/Inventors

Ivo Otto, IV

Albany, NYUS3 patents

4 Patents

US125936342026
Selective Gas Phase Etch of Silicon Germanium Alloys
TOKYO ELECTRON LIMITED
0 cites
US124446142025
Etch Selectivity Modulation by Fluorocarbon Treatment
Tokyo Electron Limited
0 cites
US122610532025
Substrate Processing with Selective Etching
Tokyo Electron Limited
0 cites
US122610542025
Substrate Processing with Material Modification and Removal
Tokyo Electron Limited
0 cites