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Inventors
Ivan Zyulkov
Brussels
BE
5 patents
4 Patents
US12598968
2026
Method of Forming Patterned Structures
ASM IP Holding, B.V.
0 cites
US12394626
2025
Method of Forming a Structure and System for Same
ASM IP Holding B.V.
0 cites
US12169361
2024
Substrate Processing Apparatus and Method
ASM IP Holding B.V.
0 cites
US11735422
2023
Method of Forming a Photoresist Underlayer and Structure Including Same
ASM IP Holding B.V.
0 cites