Patents/Inventors

Ivan Maleev

Fremont, CAUS13 patents

7 Patents

US126222102026
Metrology Integrated with Vacuum Processing
Tokyo Electron Limited
0 cites
US125884672026
Optical Sensors for Measuring Properties of Consumable Parts in a Semiconductor Plasma Processing Chamber
Tokyo Electron Limited
0 cites
US125296552026
Broom Camera and Rotational Stage for Metrology Measurements
Tokyo Electron Limited
0 cites
US123604632025
Fiber Bundle Based Optical Spot Size Selector
Tokyo Electron Limited
0 cites
US119898762024
Method and Apparatus for Inspecting Pattern Collapse Defects
Tokyo Electron Limited
0 cites
US116762662023
Method and Apparatus for Inspecting Pattern Collapse Defects
Tokyo Electron Limited
0 cites
US116642832023
Raman Sensor for Supercritical Fluids Metrology
TOKYO ELECTRON LIMITED
0 cites