Patents/Inventors

Ivan L. Berry, III

Green Valley, AZUS2 patents

3 Patents

US123027602025
Ion Beam Etching with Sidewall Cleaning
Lam Research Corporation
0 cites
US120291332024
Ion Beam Etching with Sidewall Cleaning
Lam Research Corporation
0 cites
US116370222023
Electron Excitation Atomic Layer Etch
Lam Research Corporation
0 cites