Patents/Inventors

Itsuki Kobata

TokyoJP10 patents

11 Patents

US123507872025
Substrate Processing Apparatus
EBARA CORPORATION
0 cites
US121793122024
Apparatus for Polishing, Processing System, and Method of Polishing
EBARA CORPORATION
0 cites
US121547972024
Substrate Processing Method and Substrate Processing Apparatus
EBARA CORPORATION
0 cites
US120625632024
Substrate Processing Apparatus, Substrate Processing System, and Substrate Processing Method
EBARA CORPORATION
0 cites
US120338472024
Cleaning Module, Substrate Processing Apparatus Including Cleaning Module, and Cleaning Method
EBARA CORPORATION
0 cites
US120173232024
Polishing Head System and Polishing Apparatus
EBARA CORPORATION
0 cites
US119809982024
Polishing Device, Polishing Method, and Recording Medium for Recording Program for Determining Supply Position of Polishing Liquid
EBARA CORPORATION
0 cites
US119260182024
Apparatus for Polishing and Method of Polishing
EBARA CORPORATION
0 cites
US118399482023
Polishing Apparatus
EBARA CORPORATION
0 cites
US117312402023
Substrate Processing Apparatus
EBARA CORPORATION
0 cites
US116732222023
Polishing Head System and Polishing Apparatus
EBARA CORPORATION
0 cites