Patents/Inventors

Itsuki Kajino

KyotoJP4 patents

3 Patents

US125894032026
Substrate Processing Apparatus and Substrate Processing Method
SCREEN HOLDINGS CO., Ltd.
0 cites
US125819032026
Centering Device, Centering Method, and Substrate Processing Apparatus
SCREEN Holdings Co., Ltd.
0 cites
US124244732025
Centering Device, Centering Method and Substrate Processing Apparatus
SCREEN Holdings Co., Ltd.
0 cites