Patents/Inventors

Isao Sugaya

KawasakiJP11 patents

9 Patents

US125989392026
Substrate Bonding Device, Calculation Device, Substrate Bonding Method, and Calculation Method
SCREEN Holdings Co., Ltd.
0 cites
US125061112025
Alignment Method and Alignment Apparatus
Nikon Corporation
0 cites
US121659022024
Substrate Bonding Apparatus and Substrate Bonding Method
Nikon Corporation
0 cites
US121070682024
Method and Device for Manufacturing Stacked Substrate
Nikon Corporation
0 cites
US121006672024
Apparatus for Stacking Substrates and Method for the Same
Nikon Corporation
0 cites
US120805542024
Bonding Method, Bonding Device, and Holding Member
NIKON CORPORATION
0 cites
US118429052023
Stacked Substrate Manufacturing Method, Stacked Substrate Manufacturing Apparatus, Stacked Substrate Manufacturing System, and Substrate Processing Apparatus
Nikon Corporation
0 cites
US118239352023
Stacking Apparatus and Stacking Method
NIKON CORPORATION
0 cites
US117912232023
Substrate Bonding Apparatus and Substrate Bonding Method
Nikon Corporation
0 cites