Patents/Inventors

Isao Hirano

KanagawaJP1 patent

2 Patents

US124853872025
Film Cleaning Solution and Method for Cleaning Film
TOKYO OHKA KOGYO CO., Ltd.
0 cites
US119818802024
Cleaning Composition and Cleaning Method for Component of Semiconductor Manufacturing Process Chamber
TOKYO OHKA KOGYO CO., Ltd.
0 cites