Patents/Inventors

Ilya Bezel

Mountain View, CAUS13 patents

12 Patents

US125384082026
Laser-sustained Plasma Generation in Supersonic Gas Jets
KLA Corporation
0 cites
US124529872025
High-power Compact VUV Laser-sustained Plasma Light Source
KLA Corporation
0 cites
US121989212025
Laser-sustained Plasma Light Source with Tapered Window
KLA Corporation
0 cites
US120338452024
Laser-sustained Plasma Source Based on Colliding Liquid Jets
KLA Corporation
0 cites
US119786202024
Swirler for Laser-sustained Plasma Light Source with Reverse Vortex Flow
KLA Corporation
0 cites
US119212972024
System and Method for Pumping Laser Sustained Plasma with an Illumination Source Having Modified Pupil Power Distribution
KLA Corporation
0 cites
US118878352024
Laser-sustained Plasma Lamps with Graded Concentration of Hydroxyl Radical
KLA Corporation
0 cites
US118441722023
System and Method for Vacuum Ultraviolet Lamp Assisted Ignition of Oxygen-containing Laser Sustained Plasma Sources
KLA Corporation
0 cites
US117768042023
Laser-sustained Plasma Light Source with Reverse Vortex Flow
KLA Corporation
0 cites
US117787202023
High Efficiency Laser-sustained Plasma Light Source with Collection of Broadband Radiation
KLA Corporation
0 cites
US116901622023
Laser-sustained Plasma Light Source with Gas Vortex Flow
KLA Corporation
0 cites
US115960482023
Rotating Lamp for Laser-sustained Plasma Illumination Source
KLA Corporation
0 cites