Patents/Inventors

Iliya Sigal

Stamford, CTUS2 patents

2 Patents

US125608722026
Vacuum Sheet Bond Fixturing and Flexible Burl Applications for Substrate Tables
ASML Netherlands B.V.
0 cites
US119889712024
Lithographic Apparatus, Substrate Table, and Method
ASML NETHERLANDS B.V.
0 cites