Patents/Inventors

Ikko Tanaka

MiyagiJP4 patents

4 Patents

US126092772026
Method for Determining Amount of Wear of Edge Ring, Plasma Processing Apparatus, and Substrate Processing System
Tokyo Electron Limited
0 cites
US125801542026
Etching Method and Plasma Processing Apparatus
TOKYO ELECTRON LIMITED
0 cites
US123548412025
Substrate Processing Device, Substrate Processing System, Control Method for Substrate Processing Device, and Control Method for Substrate Processing System
Tokyo Electron Limited
0 cites
US116768002023
Substrate Processing Apparatus and Control Method of Substrate Processing Apparatus
TOKYO ELECTRON LIMITED
0 cites