Patents/Inventors

Igor Vladimirovich Fomenkov

San Diego, CAUS6 patents

7 Patents

US123895192025
Guiding Device and Associated System
ASML NETHERLANDS B.V.
0 cites
US123692442025
Laser System for Source Material Conditioning in an EUV Light Source
ASML Netherlands B.V.
0 cites
US122874552025
Oxygen-loss Resistant Top Coating for Optical Elements
ASML Netherlands B.V.
0 cites
US121710532024
System for Monitoring a Plasma
ASML Netherlands B.V.
0 cites
US120789342024
Laser System for Target Metrology and Alteration in an EUV Light Source
ASML Netherlands B.V.
0 cites
US118468872023
Prolonging Optical Element Lifetime in an EUV Lithography System
ASML Netherlands B.V.
0 cites
US118222522023
Guiding Device and Associated System
ASML NETHERLANDS B.V.
0 cites