Patents/Inventors

Igor Turovets

RehovotIL3 patents

4 Patents

US124983322025
Imaging Metrology
NOVA Ltd.
0 cites
US121650232024
Measuring Local CD Uniformity Using Scatterometry and Machine Learning
INTERNATIONAL BUSINESS MACHINES CORPORATION
0 cites
US121528692024
Monitoring System and Method for Verifying Measurements in Patterned Structures
NOVA Ltd.
0 cites
US116399012023
Test Structure Design for Metrology Measurements in Patterned Samples
NOVA Ltd
0 cites