Patents/Inventors

Igor Matheus Petronella Aarts

Port Chester, NYUS6 patents

6 Patents

US124746472025
Generating an Alignment Signal Based on Local Alignment Mark Distortions
ASML HOLDING N.V.
0 cites
US124614572025
Asymmetry Extended Grid Model for Wafer Alignment
ASML NETHERLANDS B.V.
0 cites
US120322992024
Metrology Method and Associated Metrology and Lithographic Apparatuses
ASML NETHERLANDS B.V.
0 cites
US119716652024
Wafer Alignment Using Form Birefringence of Targets or Product
ASML Holding N.V.
0 cites
US118993802024
Apparatus for and Method of Sensing Alignment Marks
ASML Holding N.V.
0 cites
US118357522023
Broad Spectrum Radiation by Supercontinuum Generation Using a Tapered Optical Fiber
ASML HOLDING N.V.
0 cites