Patents/Inventors

I-kuan Lin

Bedford, MAUS4 patents

5 Patents

US126127002026
Articles Coated with a Fluoro-annealed Film
Entegris, Inc.
0 cites
US120847782024
Coatings for Enhancement of Properties and Performance of Substrate Articles and Apparatus
ENTEGRIS, Inc.
0 cites
US120183822024
Coatings for Enhancement of Properties and Performance of Substrate Articles and Apparatus
ENTEGRIS, Inc.
0 cites
US117281992023
Substrate Support Features and Method of Application
ASMPT NEXX, Inc.
0 cites
US117135042023
Chemical Resistant Multi-layer Coatings Applied by Atomic Layer Deposition
ENTEGRIS, Inc.
0 cites