Patents/Inventors

Hyunwoo Yu

VeldhovenNL3 patents

3 Patents

US125786532026
Method for Determining a Sampling Scheme, a Semiconductor Substrate Measurement Apparatus, a Lithographic Apparatus
ASML NETHERLANDS B.V.
0 cites
US121893022025
Computational Metrology
ASML NETHERLANDS B.V.
0 cites
US120449812024
Method and Apparatus for Optimization of Lithographic Process
ASML NETHERLANDS B.V.
0 cites