Patents/Inventors

Hyunji Song

Anyang-siKR4 patents

5 Patents

US123025792025
Method for Forming a Three-dimensional Semiconductor Memory Device with an Improved Etching Step
Samsung Electronics Co., Ltd.
0 cites
US121273962024
Method of Manufacturing Integrated Circuit Device
SAMSUNG ELECTRONICS CO., Ltd.
0 cites
US117513792023
Semiconductor Memory Device
SAMSUNG ELECTRONICS CO., Ltd.
0 cites
US116812192023
Resist Composition
SAMSUNG ELECTRONICS CO., Ltd.
0 cites
US116626622023
Photo-decomposable Compound, Photoresist Composition Including the Same, and Method of Manufacturing Integrated Circuit Device
SAMSUNG ELECTRONICS CO., Ltd.
0 cites