11 Patents
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- US123343082025Batch-type Apparatus for Atomic Layer Etching (ALE), and ALE Method and Semiconductor Device Manufacturing Method Based on the Same Apparatus
SAMSUNG ELECTRONICS CO., Ltd.
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- US120210802024Semiconductor Device and Method of Manufacturing the Same
Samsung Electronics Co., Ltd.
0 cites - US117423512023Semiconductor Device and Method of Manufacturing the Same
Samsung Electronics Co., Ltd.
0 cites - US115576562023Semiconductor Device Having a Capping Pattern on a Gate Electrode
SAMSUNG ELECTRONICS CO., Ltd.
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