Patents/Inventors

Hyungsik Ko

Suwon-siKR3 patents

3 Patents

US125557542026
Focus Ring, Substrate Processing Apparatus Including the Same, and Substrate Processing Method Using the Same
SAMSUNG ELECTRONICS CO., Ltd.
0 cites
US124008392025
Focus Ring and Apparatus for Processing a Substrate Including the Same
Samsung Electronics Co., Ltd.
0 cites
US120091872024
Plasma Shutter and Substrate Processing Apparatus Including the Same
SAMSUNG ELECTRONICS CO., Ltd.
0 cites