Patents/Inventors

Hyungchul Moon

Cheonan-siKR3 patents

3 Patents

US119231812024
Substrate Processing Apparatus for Minimizing the Effect of a Filling Gas During Substrate Processing
ASM IP Holding B.V.
0 cites
US118407612023
Substrate Processing Apparatus
ASM IP Holding B.V.
0 cites
US116461842023
Substrate Processing Apparatus
ASM IP Holding B.V.
0 cites