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Inventors
Hyunchul Ko
Anseong-si
KR
1 patent
2 Patents
US11827975
2023
Photoplasma Etching Apparatus Having Improved Plasma-resistant and Manufacturing Method Therefor Using a Thermal Diffusion Phenomenon of a Rare-earth Metal Thin Film
KOMICO Ltd.
0 cites
US11795547
2023
Method of Aerosol Deposition Coating for Plasma Resistant Coating
KOMICO Ltd.
0 cites