3 Patents
- US123277122025High Voltage Power Supply Apparatus and Plasma Etching Equipment Having the Same
SAMSUNG ELECTRONICS CO., Ltd.
0 cites - US120026512024Voltage Waveform Generator, Wafer Processing Apparatus and Plasma Processing Apparatus
SAMSUNG ELECTRONICS CO., Ltd.
0 cites - US117053062023Variable Frequency and Non-sinusoidal Power Generator Using Double Side Cooling, Plasma Processing Apparatus Including the Same and Method of Manufacturing Semiconductor Device Using the Same
Samsung Electronics Co., Ltd.
0 cites