Hyun Jin Chang

3 Patents

• US121070522024

  Overlay Mark Forming Moire Pattern, Overlay Measurement Method Using Same, Overlay Measurement Apparatus Using Same, and Manufacturing Method of Semiconductor Device Using Same

  AUROS TECHNOLOGY, Inc.

  0 cites
• US120210402024

  Overlay Mark Forming Moire Pattern, Overlay Measurement Method Using Same, and Manufacturing Method of Semiconductor Device Using Same

  AUROS TECHNOLOGY, Inc.

  0 cites
• US116044212023

  Overlay Mark, Overlay Measurement Method and Semiconductor Device Manufacturing Method Using the Overlay Mark

  AUROS TECHNOLOGY, Inc.

  0 cites