Patents/Inventors

Hyoungkyu Son

SeoulKR2 patents

3 Patents

US124566062025
Support Unit and Apparatus for Treating Substrate
SEMES CO., Ltd.
0 cites
US122494912025
Substrate Treating Apparatus and Substrate Support Unit
SEMES CO., Ltd.
0 cites
US119159052024
Support Unit and Substrate Treating Apparatus Including the Same
SEMES CO., Ltd.
0 cites