2 Patents
- US118676432024Planar-type Plasma Diagnosis Apparatus, Wafer-type Plasma Diagnosis Apparatus in Which Planar-type Plasma Diagnosis Apparatus Is Buried, and Electrostatic Chuck in Which Planar-type Plasma Diagnosis Apparatus Is Buried
KOREA RESEARCH INSTITUTE OF STANDARDS AND SCIENCE
0 cites - US117353972023Device for Measuring Plasma Ion Density and Apparatus for Diagnosing Plasma Using the Same
KOREA RESEARCH INSTITUTE OF STANDARDS AND SCIENCE
0 cites