Hung-jung Hsu

3 Patents

• US120011432024

  Lithography Exposure System with Debris Removing Mechanism

  TAIWAN SEMICONDUCTOR MANUFACTURING CO., Ltd.

  0 cites
• US117549282023

  Lithography Exposure Method with Debris Removing Mechanism

  TAIWAN SEMICONDUCTOR MANUFACTURING CO., Ltd.

  0 cites
• US116328492023

  Method and Apparatus for Mitigating Contamination

  TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, Ltd.

  0 cites