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Huina Xu
Los Altos, CA
US
2 patents
2 Patents
US12548141
2026
Active Learning-based Defect Location Identification
ASML NETHERLANDS B.V.
0 cites
US11733613
2023
Prediction of Out of Specification Based on a Spatial Characteristic of Process Variability
ASML NETHERLANDS B.V.
0 cites