Patents/Inventors

Hui-chi Huang

HsinchuTW20 patents

20 Patents

US125687862026
Processing Tool and Method
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, Ltd.
0 cites
US125506522026
Wafer Edge Trimming Process Including Water Jet and Wedge Separation and Methods Thereof
Taiwan Semiconductor Manufacturing Co., Ltd.
0 cites
US123590902025
Composition and Method for Polishing and Integrated Circuit
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY Ltd.
0 cites
US123622012025
Bevel Edge Removal Methods, Tools, and Systems
Taiwan Semiconductor Manufacturing Company, Ltd.
0 cites
US123277342025
Chemical Mechanical Polish Slurry and Method of Manufacture
Taiwan Semiconductor Manufacturing Company, Ltd.
0 cites
US122973752025
Slurry Composition and Method for Polishing and Integrated Circuit
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY Ltd.
0 cites
US123005082025
Chemical Mechanical Polishing Method
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY Ltd.
0 cites
US122495422025
Semiconductor Device Structure with an Interconnect Structure in a Dielectric Layer with Multiple Hydrophobic Layers Along Sidewalls of the Dielectric Layer, and Method for Forming the Same
Taiwan Semiconductor Manufacturing Company, Ltd.
0 cites
US121284552024
Electrical Cleaning Tool for Wafer Polishing Tool System
Taiwan Semiconductor Manufacturing Company, Ltd.
0 cites
US120875902024
Self-healing Polishing Pad
Taiwan Semiconductor Manufacturing Co., Ltd.
0 cites
US120366362024
Mega-sonic Vibration Assisted Chemical Mechanical Planarization
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, Ltd.
0 cites
US120301592024
Chemical Mechanical Planarization Tool
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, Ltd.
0 cites
US119643582024
Chemical Mechanical Polishing Apparatus and Method
Taiwan Semiconductor Manufacturing Company, Ltd.
0 cites
US118507042023
Methods to Clean Chemical Mechanical Polishing Systems
Taiwan Semiconductor Manufacturing Co., Ltd.
0 cites
US118548272023
Magnetic Slurry for Highly Efficiency CMP
Taiwan Semiconductor Manufacturing Company, Ltd.
0 cites
US118548722023
Semiconductor Device Structure with Interconnect Structure and Method for Forming the Same
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, Ltd.
0 cites
US117127782023
Chemical Mechanical Planarization Tool
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, Ltd.
0 cites
US116642132023
Bevel Edge Removal Methods, Tools, and Systems
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, Ltd.
0 cites
US115906272023
Mega-sonic Vibration Assisted Chemical Mechanical Planarization
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, Ltd.
0 cites
US115519362023
Self-healing Polishing Pad
Taiwan Semiconductor Manufacturing Co., Ltd.
0 cites