Patents/Inventors

Hubert Holderer

OberkochenDE1 patent

2 Patents

US117893672023
Facet Mirror for an Illumination Optical Unit of a Projection Exposure Apparatus
Carl Zeiss SMT GmbH
0 cites
US117200282023
Measurement Illumination Optical Unit for Guiding Illumination Light Into an Object Field of a Projection Exposure System for EUV Lithography
Carl Zeiss SMT GmbH
0 cites