Patents/Inventors

Hua Chung

San Jose, CAUS7 patents

8 Patents

US122975592025
Method and Apparatus for Low Temperature Selective Epitaxy in a Deep Trench
APPLIED MATERIALS, Inc.
0 cites
US119591672024
Selective Cobalt Deposition on Copper Surfaces
APPLIED MATERIALS, Inc.
0 cites
US119461352024
Low Temperature Deposition of Iridium Containing Films
Applied Materials, Inc.
0 cites
US117911662023
Selective Etch Process Using Hydrofluoric Acid and Ozone Gases
MATTSON TECHNOLOGY, Inc.
0 cites
US117911812023
Methods for the Treatment of Workpieces
MATTSON TECHNOLOGY, Inc.
0 cites
US116495592023
Method of Utilizing a Degassing Chamber to Reduce Arsenic Outgassing Following Deposition of Arsenic-containing Material on a Substrate
Applied Materials, Inc.
0 cites
US116437212023
Low Temperature Deposition of Iridium Containing Films
Applied Materials, Inc.
0 cites
US116262692023
Chamber Seasoning to Improve Etch Uniformity by Reducing Chemistry
MATTSON TECHNOLOGY, Inc.
0 cites