Patents/Inventors

Hu Kang

Tualatin, ORUS6 patents

6 Patents

US124486872025
Dynamic Precursor Dosing for Atomic Layer Deposition
Lam Research Corporation
0 cites
US123548712025
Ultrathin Atomic Layer Deposition Film Accuracy Thickness Control
Lam Research Corporation
0 cites
US122610382025
Gapfill of Variable Aspect Ratio Features with a Composite PEALD and PECVD Method
Lam Research Corporation
0 cites
US119707722024
Dynamic Precursor Dosing for Atomic Layer Deposition
Lam Research Corporation
0 cites
US116705032023
Method of Atomic Layer Deposition
Lam Research Corporation
0 cites
US116461982023
Ultrathin Atomic Layer Deposition Film Accuracy Thickness Control
Lam Research Corporation
0 cites