17 Patents
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- US125403962026System and Method for Monitoring and Performing Thin Film Deposition
Taiwan Semiconductor Manufacturing Co., Ltd.
0 cites - US123601792025System and Method for Measuring Magnetic Fields in PVD System
Taiwan Semiconductor Manufacturing Co., Ltd.
0 cites - US123641732025Resistive Memory Cell Using an Interfacial Transition Metal Compound Layer and Method of Forming the Same
Taiwan Semiconductor Manufacturing Company Limited
0 cites - US123410422025Method for Depositing Target Material in Deposition Chamber with Tiltable Workpiece Holder
Taiwan Semiconductor Manufacturing Co., Ltd.
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- US119652372024System and Method for Detecting Abnormality of Thin-film Deposition Process
Taiwan Semiconductor Manufacturing Company, Ltd.
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- US117422312023Movable Wafer Holder for Film Deposition Chamber Having Six Degrees of Freedom
Taiwan Semiconductor Manufacturing Co., Ltd.
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- US116886152023System and Method for Heating Semiconductor Wafers
Taiwan Semiconductor Manufacturing Co., Ltd.
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