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Inventors
Hsing-chen Wu
Hsinchu
TW
2 patents
3 Patents
US12129418
2024
Selective Etchant Compositions and Methods
ENTEGRIS, Inc.
0 cites
US11788007
2023
Method for Removing Hard Masks
ENTEGRIS, Inc.
0 cites
US11697767
2023
Silicon Nitride Etching Composition and Method
ENTEGRIS, Inc.
0 cites