Hsin-fu Tseng

5 Patents

• US125324002026

  EUV Source with Rotation Crucible and Laser and Tin (SN) Auto-filling Method

  Taiwan Semiconductor Manufacturing Co., Ltd.

  0 cites
• US124875312025

  Extreme Ultraviolet (EUV) Radiation Source Apparatus, EUV Lithography System, and Method for Generating Extreme Ultraviolet Radiation

  TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY Ltd.

  0 cites
• US124227442025

  Photomask Inspection Method and Apparatus Thereof

  TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY Ltd.

  0 cites
• US120726212024

  Photomask Inspection Method and Apparatus Thereof

  TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY Ltd.

  0 cites
• US116146842023

  Photomask Inspection Method and Apparatus Thereof

  TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY Ltd.

  0 cites