Hsiao-lun Chang

5 Patents

• US120289592024

  EUV Light Source and Apparatus for EUV Lithography

  TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, Ltd.

  0 cites
• US119977782024

  Replacement and Refill Method for Droplet Generator

  TAIWAN SEMICONDUCTOR MANUFACTURING CO., Ltd.

  0 cites
• US119829442024

  Method of Lithography Process and Transferring a Reticle

  TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, Ltd.

  0 cites
• US117037632023

  Method of Lithography Process Using Reticle Container with Discharging Device

  Taiwan Semiconductor Manufacturing Company, Ltd.

  0 cites
• US115990302023

  Droplet Catcher, Droplet Catcher System of EUV Lithography Apparatus, and Maintenance Method of the EUV Lithography Apparatus

  Taiwan Semiconductor Manufacturing Company, Ltd.

  0 cites