Patents/Inventors

Hsiang-ming Chang

HsinchuTW3 patents

4 Patents

US124826542025
System and Method for Multiple Step Directional Patterning
Taiwan Semiconductor Manufacturing Co., Ltd.
0 cites
US124761502025
Critical Dimension Uniformity (CDU) Control Method and Semiconductor Substrate Processing System
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, Ltd.
0 cites
US123548732025
System and Method for Multiple Step Directional Patterning
Taiwan Semiconductor Manufacturing Co., Ltd.
0 cites
US120273682024
Method for Fabricating Semiconductor Device
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, Ltd.
0 cites