Hrishikesh Patel

3 Patents

• US125720782026

  Radiation Source Module and Lithographic Apparatus

  ASML Netherlands B.V.

  0 cites
• US121177262024

  Pellicle and Pellicle Assembly

  ASML NETHERLANDS B.V.

  0 cites
• US117549182023

  Pellicle and Pellicle Assembly

  ASML NETHERLANDS B.V.

  0 cites