Patents/Inventors

Hozumi Yasuda

TokyoJP5 patents

6 Patents

US122117332025
Substrate Processing Apparatus and Substrate Processing Method
EBARA CORPORATION
0 cites
US121285232024
Polishing Apparatus
EBARA CORPORATION
0 cites
US120366342024
Substrate Processing Control System, Substrate Processing Control Method, and Program
EBARA CORPORATION
0 cites
US120173232024
Polishing Head System and Polishing Apparatus
EBARA CORPORATION
0 cites
US119118722024
Substrate Processing Apparatus and Substrate Processing Method
Ebara Corporation
0 cites
US117354572023
Substrate Processing Apparatus and Substrate Processing Method
Ebara Corporation
0 cites