8 Patents
- US125105902025Metrology in the Presence of CMOS Under Array (cua) Structures Utilizing an Effective Medium Model with Physical Modeling
KLA Corporation
0 cites - US124808932025Optical and X-ray Metrology Methods for Patterned Semiconductor Structures with Randomness
KLA Corporation
0 cites - 0 cites
- US123803672025Metrology in the Presence of CMOS Under Array (cua) Structures Utilizing Machine Learning and Physical Modeling
KLA Corporation
0 cites - US123728822025Metrology in the Presence of CMOS Under Array (CUA) Structures Utilizing an Effective Medium Model with Classification of CUA Structures
KLA Corporation
0 cites - US117963902023Bandgap Measurements of Patterned Film Stacks Using Spectroscopic Metrology
KLA Corporation
0 cites - US115730772023Scatterometry Based Methods and Systems for Measurement of Strain in Semiconductor Structures
KLA Corporation
0 cites - 0 cites