Patents/Inventors

Hosun Yoo

Suwon-siKR7 patents

6 Patents

US125623572026
Apparatus for Monitoring a Plasma Process
SAMSUNG ELECTRONICS CO., Ltd.
0 cites
US121702332024
Plasma Treatment Apparatus, a Method of Monitoring a Process of Manufacturing a Semiconductor Device by Using the Same, and a Method of Manufacturing a Semiconductor Device Including the Monitoring Method
Samsung Electronics Co., Ltd.
0 cites
US121192102024
Fastening Automation Apparatus for Upper Electrode
SAMSUNG ELECTRONICS CO., Ltd.
0 cites
US120209092024
Plasma Processing Apparatus and Plasma Processing Method
Samsung Electronics Co., Ltd.
0 cites
US117200272023
Apparatus for Generating Extreme Ultraviolet Light and Lithography Apparatus Including the Same
SAMSUNG ELECTRONICS CO., Ltd.
0 cites
US116461792023
Plasma Processing Apparatus and Plasma Processing Method
Samsung Electronics Co., Ltd.
0 cites