5 Patents
- US125371782026Integrated Hardware-software Computer Vision System for Autonomous Control and Inspection of Substrate Processing Systems
LAM RESEARCH CORPORATION
0 cites - US124244702025Systems and Methods for Autonomous Process Control and Optimization of Semiconductor Equipment Using Light Interferometry and Reflectometry
LAM RESEARCH CORPORATION
0 cites - US123410402025Integrated Adaptive Positioning Systems and Routines for Automated Wafer-handling Robot Teach and Health Check
Lam Research Corporation
0 cites - 0 cites
- US121237092024Measurement System to Measure a Thickness of an Adjustable Edge Ring for a Substrate Processing System
Lam Research Corporation
0 cites