23 Patents
- US125989832026Interconnects Formed Using Integrated Damascene and Subtractive Etch Processing
International Business Machines Corporation
0 cites - US125882612026Selective Deposition on Metals Using Porous Low-k Materials
INTERNATIONAL BUSINESS MACHINES CORPORATION
0 cites - 0 cites
- US125507132026Hybrid Buried Power Rail Structure with Dual Front Side and Backside Processing
International Business Machines Corporation
0 cites - US125385532026Contact Structure for Power Delivery on Semiconductor Device
International Business Machines Corporation
0 cites - US124944082025Double Patterned Microcooler Having Alternating Fin Widths
International Business Machines Corporation
0 cites - US124245492025Skip-level TSV with Hybrid Dielectric Scheme for Backside Power Delivery
International Business Machines Corporation
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- US124179632025Isolation Rail Between Backside Power Rails
International Business Machines Corporation
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- US123343982025Multilayer Dielectric Stack for Damascene Top-via Integration
International Business Machines Corporation
0 cites - US123344422025Dielectric Caps for Power and Signal Line Routing
International Business Machines Corporation
0 cites - US122666072025Bottom Barrier Free Interconnects Without Voids
International Business Machines Corporation
0 cites - US122610562025Top via Patterning Using Metal as Hard Mask and via Conductor
INTERNATIONAL BUSINESS MACHINES CORPORATION
0 cites - US122180032025Selective ILD Deposition for Fully Aligned via with Airgap
Adeia Semiconductor Solutions LLC
0 cites - US121486992024High Aspect Ratio Buried Power Rail Metallization
International Business Machines Corporation
0 cites - US118044052023Method of Forming Copper Interconnect Structure with Manganese Barrier Layer
Tessera LLC
0 cites - US117567862023Forming High Carbon Content Flowable Dielectric Film with Low Processing Damage
International Business Machines Corporation
0 cites - US117568872023Backside Floating Metal for Increased Capacitance
International Business Machines Corporation
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- US115691342023Wafer Backside Engineering for Wafer Stress Control
International Business Machines Corporation
0 cites