Patents/Inventors

Hoonseop Kim

Suwon-siKR1 patent

2 Patents

US120875502024
Device for Measuring Density of Plasma, Plasma Processing System, and Semiconductor Device Manufacturing Method Using the Same
SAMSUNG ELECTRONICS CO., Ltd.
0 cites
US119406202024
Method of Cleaning Collector of EUV Light Source System
Samsung Electronics Co., Ltd.
0 cites