Patents/Inventors

Hongxiang Zhao

San Jose, CAUS9 patents

2 Patents

US126019762026
All-in-one Dry Development for Metal-containing Photoresist
Lam Research Corporation
0 cites
US124746402025
Integration of Dry Development and Etch Processes for EUV Patterning in a Single Process Chamber
Lam Research Corporation
0 cites