Patents/Inventors

Hongtaek Lim

SeoulKR1 patent

2 Patents

US124630182025
Edge Ring, Substrate Processing Apparatus Having the Same and Method of Manufacturing Semiconductor Device Using the Apparatus
SAMSUNG ELECTRONICS CO., Ltd.
0 cites
US124244392025
Method of Depositing Atomic Layer and Method of Manufacturing Semiconductor Device
Samsung Electronics Co., Ltd.
0 cites