3 Patents
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- US118460242023Laser-assisted Metal-organic Chemical Vapor Deposition Devices and Methods of Use Thereof for Suppressing Background Carbon Incorporation
Ohio State Innovation Foundation
0 cites - US116241262023Deposition of Single Phase Beta-(alxga1-x)2o3 Thin Films with 0.28< =x<=0.7 on Beta Ga2o3(100) or (−201) Substrates by Chemical Vapor Deposition
Ohio State Innovation Foundation
0 cites