Patents/Inventors

Hong Shih

Cupertino, CAUS4 patents

4 Patents

US125448092026
Conditioning Chamber Component
Lam Research Corporation
0 cites
US124008422025
Method of Cleaning Chamber Components with Metal Etch Residues
Lam Research Corporation
0 cites
US121295692024
Method for Conditioning Semiconductor Processing Chamber Components
Lam Research Corporation
0 cites
US120647952024
Conditioning Chamber Component
Lam Research Corporation
0 cites