Patents/Inventors

Holger Tuitje

Fremont, CAUS7 patents

3 Patents

US126222102026
Metrology Integrated with Vacuum Processing
Tokyo Electron Limited
0 cites
US122610302025
Normal-incidence In-situ Process Monitor Sensor
Tokyo Electron Limited
0 cites
US119617212024
Normal-incidence In-situ Process Monitor Sensor
Tokyo Electron Limited
0 cites