7 Patents
- US125654162026MEMS Having a Large Fluidically Effective Surface
Fraunhofer-gesellschaft Zur Förderung Der Angewandten Forschung E. V.
0 cites - US125093452025Microelectromechanical Acoustic Pressure-generating Device with Improved Drive
ROBERT BOSCH GmbH
0 cites - 0 cites
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- US117706592023MEMS Device, Assembly Comprising the MEMS Device, and Method of Operating the MEMS Device
Fraunhofer-gesellschaft Zur Förderung Der Angewandten Forschung E. V.
0 cites - US116397182023Micromechanical Devices with Mechanical Actuators
Fraunhofer-gesellschaft Zur Foerderung Der Angewandten Forschung E.v.
0 cites - US115549502023MEMS Transducer for Interacting with a Volume Flow of a Fluid, and Method of Producing Same
FRAUNHOFER-GESELLSCHAFT ZUR FÖRDERUNG DER ANGEWANDTEN FORSCHUNG E.V.
0 cites